Frieder Baumann: search on Z-Library

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1

Large area gratings by x-ray LIGA dynamic exposure for x-ray phase-contrast imaging

Schröter, Tobias J., Koch, Frieder, Meyer, Pascal, Baumann, Martin, Münch, Daniel, Kunka, Danays, Engelhardt, Sabine, Zuber, Marcus, Baumbach, Tilo, Mohr, Jürgen

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2017

Language:

english

File:

PDF, 2.91 MB

english, 2017

2

Structural characterization of tantalum nitride films as wet etch stop layer in advanced multiwork function metal gate MOSFETs

Mennell, Petra, Parvaneh, Hamed, Bayindir, Zeynel, Kang, Dong Hun, Baumann, Frieder, Madan, Anita, Bello, Abner, Shalini, Ashawaraya, Klare, Mark

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2018

Language:

english

File:

PDF, 2.30 MB

english, 2018

3

Challenges of nickel silicidation in CMOS technologies

Breil, Nicolas, Lavoie, Christian, Ozcan, Ahmet, Baumann, Frieder, Klymko, Nancy, Nummy, Karen, Sun, Bing, Jordan-Sweet, Jean, Yu, Jian, Zhu, Frank, Narasimha, Shreesh, Chudzik, Michael

Journal:

Microelectronic Engineering

Year:

2015

Language:

english

File:

PDF, 2.40 MB

english, 2015

4

Advances in Elemental Electron Tomography for the State-of-the-art Semiconductor Devices and Circuits Characterization and Failure Analysis

Fu, B., Gribelyuk, M, Baumann, Frieder H., Fang, C., Zhao, Wayne, Chen, E., Brooks, I.

Journal:

Microscopy and Microanalysis

Year:

2017

Language:

english

File:

PDF, 299 KB

english, 2017

5

A Case-Study of Bubble Formation Mechanism by Analytical TEM during Evaluation of an Incoming Spin-On-Hardmask at Wafer-Foundries

Zhao, Wayne W., Baumann, Frieder

Journal:

Microscopy and Microanalysis

Year:

2019

Language:

english

File:

PDF, 314 KB

english, 2019

6

Towards Routine EDX Tomography in Semiconductor Failure Analysis

Baumann, Frieder H., Popielarski, Brian, Mitchell, Travis, Lu, Yinggang

Journal:

Microscopy and Microanalysis

Year:

2019

Language:

english

File:

PDF, 1.41 MB

english, 2019

7

Extension of CD-TEM towards 3D Elemental Mapping

Baumann, Frieder H., Popielarski, Brian, Lu, Yinggang, Mitchell, Travis

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2020

File:

PDF, 690 KB

2020

8

Lattice Monte Carlo models of thin film deposition

George H. Gilmer, Hanchen Huang, Tomas Diaz de la Rubia, Jacques Dalla Torre, Frieder Baumann

Journal:

Thin Solid Films

Year:

2000

Language:

english

File:

PDF, 1.65 MB

english, 2000

9

Efficacy of propiverine ER with or without α-blockers related to maximum urinary flow rate in adult men with OAB: results of a 12-week, multicenter, non-interventional study

Matthias Oelke, Sandra Murgas, Ina Baumann, Frieder Schnabel, Martin C. Michel

Journal:

World Journal of Urology

Year:

2011

Language:

english

File:

PDF, 227 KB

english, 2011

10

Detecting the Unexpected: A Research Framework for Ocean Acidification

Pfister, Catherine A., Esbaugh, Andrew J., Frieder, Christina A., Baumann, Hannes, Bockmon, Emily E., White, Meredith M., Carter, Brendan R., Benway, Heather M., Blanchette, Carol A., Carrington, Emil

Journal:

Environmental Science & Technology

Year:

2014

Language:

english

File:

PDF, 1.71 MB

english, 2014

11

High precision two-dimensional strain mapping in semiconductor devices using nanobeam electron diffraction in the transmission electron microscope

Baumann, Frieder H.

Journal:

Applied Physics Letters

Year:

2014

Language:

english

File:

PDF, 1.55 MB

english, 2014

12

Precipitation of gold into metastable gold silicide in silicon

Baumann, Frieder H., Schröter, Wolfgang

Journal:

Physical Review B

Year:

1991

Language:

english

File:

PDF, 3.73 MB

english, 1991

13

Simulation of physical vapor deposition into trenches and vias: Validation and comparison with experiment

O’Sullivan, Peter L., Baumann, Frieder H., Gilmer, George H.

Journal:

Journal of Applied Physics

Year:

2000

Language:

english

File:

PDF, 702 KB

english, 2000

14

Continuum model of thin film deposition incorporating finite atomic length scales

O'Sullivan, Peter L., Baumann, Frieder H., Gilmer, George H., Torre, Jacques Dalla, Shin, Chan-Soo, Petrov, Ivan, Lee, Tae-Yoon

Journal:

Journal of Applied Physics

Year:

2002

Language:

english

File:

PDF, 805 KB

english, 2002

15

From Process Assumptions to Development to Manufacturing

Standaert, Theo, Gabor, Allen, Simon, Andrew, Lisi, Anthony, Peters, Carsten, Child, Craig, Kioussis, Dimitri, Engbrecht, Edward, Chen, Fen, Baumann, Frieder, Lembach, Gerhard, Wendt, Hermann, Choi, J

Journal:

MRS Proceedings

Year:

2008

Language:

english

File:

PDF, 1.92 MB

english, 2008

16

ECS Transactions [ECS 220th ECS Meeting - Boston, MA (October 9 - October 14, 2011)] - Moisture Uptake Impact on Damage Layer of Porous Low-k Film in 80nm-Pitched Cu Interconnects

Tagami, Masayoshi, Ogino, Atsushi, Miyajima, Hideshi, Shobha, Hosadurga, Baumann, Frieder H., Ito, Fuminori, Spooner, Terry

Year:

2011

Language:

english

File:

PDF, 585 KB

english, 2011

17

Effect of TaN Stoichiometry on Barrier Oxidation and Defect Density in 32nm Cu/Ultra-Low K Interconnects

Simon, Andrew H., Baumann, Frieder H., Bolom, Tibor, Park, Jong Guk, Child, Craig, Kim, Ben, DeHaven, Patrick W., Davis, Robert E., Ogunsola, Oluwafemi O, Angyal, Matthew S

Journal:

MRS Proceedings

Year:

2010

Language:

english

File:

PDF, 354 KB

english, 2010

18

Numerical Simulations of Topographic Evolution for Sputter Deposition into Trenches and Vias

O'Sullivan, Peter L., Baumann, Frieder H., Gilmer, George H.

Journal:

MRS Proceedings

Year:

1999

Language:

english

File:

PDF, 1.50 MB

english, 1999

19

A Closer “Look” at Modern Gate Oxides

Baumann, Frieder H., Chang, C.-P., Grazul, John L., Kamgar, Avid, Liu, C. T., Muller, David A.

Journal:

MRS Proceedings

Year:

2000

Language:

english

File:

PDF, 4.73 MB

english, 2000

20

[IEEE 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2016.5.16-2016.5.19)] 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Investigation on critical thickness dependence of ALD TiN diffusion barrier in MOL

Subramaniyan, Archana, Luppi, Domingo Ferrer, Makela, Neal, Bauer, Lawrence, Madan, Anita, Murphy, Richard, Baumann, Frieder, Kohli, Kriti, Parks, Christopher

Year:

2016

Language:

english

File:

PDF, 350 KB

english, 2016

21

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 24 January 2004)] Micromachining Technology for Micro-Optics and Nano-Optics II - Monolithic integration of optical waveguides and MEMS-based switching in silicon-on-insulator

Stuart, Howie R., Johnson, Eric G., Nordin, Gregory P., Baumann, Frieder H., Wong-Foy, Annjoe

Year:

2004

Language:

english

File:

PDF, 216 KB

english, 2004

22

Characterization of VLSI Processing Defects Using STEM-EELS Tomography

Baumann, Frieder H., Miller, John, Rhoads, Bryan, Friedman, Anne, Fu, Bianzhu

Journal:

Microscopy and Microanalysis

Year:

2016

Language:

english

File:

PDF, 197 KB

english, 2016

23

[IEEE 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2017.5.15-2017.5.18)] 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Spring-lattice model for fast, flexible and easy strain prediction in semiconductor devices ET/ID: Enabling technologies and innovative devices

Baumann, Frieder H., Guinel, Maxime J-F

Year:

2017

Language:

english

File:

PDF, 365 KB

english, 2017

24

How to Avoid Artifacts in Nanobeam Diffraction Strain Measurements

Fu, B., Gribelyuk, M., Baumann, Frieder H., Wang, Yun-yu

Journal:

Microscopy and Microanalysis

Year:

2017

Language:

english

File:

PDF, 344 KB

english, 2017

25

[IEEE 2018 IEEE International Interconnect Technology Conference (IITC) - Santa Clara, CA, USA (2018.6.4-2018.6.7)] 2018 IEEE International Interconnect Technology Conference (IITC) - Modulation of Within-Wafer and Within-die Topography for Damascene Copper in Advanced Technology

Tseng, Wei-Tsu, Cheng, Tien-Jen, Ahmed, Shafaat, Lee, Jusang, Baumann, Frieder

Year:

2018

Language:

english

File:

PDF, 1.77 MB

english, 2018

26

[IEEE 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2019.5.6-2019.5.9)] 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Extension of CD-TEM towards EDS Tomography

Baumann, Frieder H., Popielarski, Brian, Lu, Yinggang

Year:

2019

Language:

english

File:

PDF, 1.13 MB

english, 2019

27

A Case-Study of Bubble Formation Mechanism by Analytical TEM during Evaluation of an Incoming Spin-On-Hardmask at Wafer-Foundries

Zhao, Wayne W., Baumann, Frieder

Journal:

Microscopy and Microanalysis

Year:

2019

File:

PDF, 314 KB

2019

28

Towards Routine EDX Tomography in Semiconductor Failure Analysis

Baumann, Frieder H., Popielarski, Brian, Mitchell, Travis, Lu, Yinggang

Journal:

Microscopy and Microanalysis

Year:

2019

File:

PDF, 1.41 MB

2019

29

Practical Considerations in Quantitative Nanoscale Energy-Dispersive X-ray Spectroscopy (EDX) and Its Application in SiGe

Weng, Weihao, Baumann, Frieder H., Ke, Yue, Loesing, Rainer, Madan, Anita, Zhu, Zhengmao, Katnani, Ahmad D.

Journal:

Microscopy and Microanalysis

Year:

2015

Language:

english

File:

PDF, 288 KB

english, 2015

30

Innovative Grounding Methodology for Epoxy Impregnated Semiconductor Cross Sections for Electron Microscopy Inspection

Baumann, Frieder, Pichumani, Pradip Sairam, Torcedo, Christopher

Journal:

Microscopy and Microanalysis

Year:

2020

File:

PDF, 445 KB

2020

31

Optimization of EDX Tomography Acquisition Geometry for Electronic Device Characterization

Baumann, Frieder, Mitchell, Travis, Utess, Dirk, Hobert, Christian

Journal:

Microscopy and Microanalysis

Year:

2020

File:

PDF, 378 KB

2020

32

Development of Ultra-thin TEM Lamella Preparation Technique and Its Application in Failure Analysis

Zhang, Yu, Popielarski, Brian, Davidson, Kevin, Men, Long, Zhao, Wayne, Baumann, Frieder

Journal:

Microscopy and Microanalysis

Year:

2020

File:

PDF, 530 KB

2020